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US 2018/0323332 A1Published application
Integrated Vapor Transport Deposition Method and System
AssigneeFirst Solar, Inc.
InventorsJohn Barden, Changming Jin, Feng Liao, Rick C. Powell, Gang Xiong
Life of this patent
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Abstract
A vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.
Claims21
A method for manufacturing a photovoltaic device comprising:
- depositing a thin film layer on a substrate using an integrated deposition apparatus;
- and
- performing a first pre- or post-deposition process on the substrate using said integrated deposition apparatus.
Dependencies are inferred from the claim text.