Schottky contact structure for semiconductor devices and method for forming such schottky contact structure
AssigneeRaytheon Company
InventorsKamal Tabatabaie-Alavi, Kezia Cheng, Christopher J. MacDonald
Life of this patent
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AssigneeRaytheon Company
InventorsKamal Tabatabaie-Alavi, Kezia Cheng, Christopher J. MacDonald
Estimating the term…
A Schottky contact structure for a semiconductor device having a Schottky contact and an electrode for the contact structure disposed on the contact. The Schottky contact comprises: a first layer of a first metal in Schottky contact with a semiconductor; a second layer of a second metal on the first layer; a third layer of the first metal on the second layer; and a fourth layer of the second metal on the third layer. The electrode for the Schottky contact structure disposed on the Schottky contact comprises a third metal, the second metal providing a barrier against migration between the third metal and the first metal.
A method for forming a Schottky contact semiconductor device, comprising:
The method recited in claim I including:
Dependencies are inferred from the claim text.