Memory Arrays
AssigneeMicron Technology, Inc.
InventorsSanh D. Tang, Martin C. Roberts
Life of this patent
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Abstract
A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. One of (a) a channel region of e transistor, or (b) a pair of electrodes of the capacitor, is directly above the other of (a) and (b). Additional embodiments and aspects are disclosed.
Claims27
A memory array comprising vertically-alternating tiers of insulative material and memory cells, the memory cells individually comprising a transistor and a capacitor, one of (a) a channel region of the transistor, or (h) a pair of electrodes of the capacitor, being directly above the other of (a) and (b).
A memory array, comprising:
- vertically-alternating tiers of insulative material and memory cells, the memory cells individually comprising:
- a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region, at least a portion of the channel region being horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions;
- a capacitor comprising first and second electrodes having a capacitor insulator there-between, the first electrode being electrically coupled to the first source/drain region, the second capacitor electrodes of multiple of the capacitors in the array being electrically coupled with one another;
- and
- one of (a) the channel region of the transistor, or (b) the first and second electrodes of the capacitor, being directly above the other of (a) and (b);
- and
- a sense-line structure extending elevationally through the vertically-alternating tiers, individual of the second source/drain regions of individual of the transistors that are in different memory cell tiers being electrically coupled to the elevationally-extending sense-line structure.
A memory array, comprising:
- vertically-alternating tiers of insulative material and memory cells, the memory cells individually comprising:
- a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region, at least a portion of the channel region being horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions;
- a capacitor comprising first and second electrodes having a capacitor insulator there-between, the first electrode being electrically coupled to the first source/drain region;
- and
- one of (a) the channel region of the transistor, or (b) the first and second electrodes of the capacitor, being directly above the other of (a) and (b);
- a capacitor-electrode structure extending elevationally through the vertically-alternating tiers, individual of the second electrodes of individual of the capacitors that are in different memory cell tiers being electrically coupled to the elevationally-extending capacitor-electrode structure;
- and
- a sense line electrically coupled to multiple of the second source/drain regions of individual of the transistors that are in different memory cell tiers.
A memory array, comprising:
- vertically-alternating tiers of insulative material and memory cells, the memory cells individually comprising:
- a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region, at least a portion of the channel region being horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions;
- a capacitor comprising first and second electrodes having a capacitor insulator there-between, the first electrode being electrically coupled to the first source/drain region;
- and
- one of (a) the channel region of the transistor, or (b) the first and second electrodes of the capacitor, being directly above the other of (a) and (b);
- a sense-line structure extending elevationally through the vertically-alternating tiers, individual of the second source/drain regions of individual of the transistors that are in different memory cell tiers being electrically coupled to the elevationally-extending sense-line structure;
- and
- a capacitor-electrode structure extending elevationally through the vertically-alternating tiers, individual of the second electrodes of individual of the capacitors that are in different memory cell tiers being electrically coupled to the elevationally-extending capacitor-electrode structure.
Dependencies are inferred from the claim text.