Indirect readout fet
AssigneeInternational Business Machines Corporation
InventorsJin-Ping Han, Yulong Li, Dennis M. Newns, Paul M. Solomon, Xiao Sun
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AssigneeInternational Business Machines Corporation
InventorsJin-Ping Han, Yulong Li, Dennis M. Newns, Paul M. Solomon, Xiao Sun
Estimating the term…
A metal-insulator-metal (MIM) capacitor structure includes source and drain regions formed within a semiconductor substrate, a first conducting layer formed over the source and drain regions, and a dielectric layer formed over the first conducting layer. The MIM capacitor structure further includes a second conducting layer formed over the dielectric layer, and a sidewall dielectric formed adjacent the first conducting layer and the dielectric layer. An electric field is created indirectly through the sidewall dielectric to an adjacent field effect transistor (FET) channel in the semiconductor substrate.
A metal-insulator-metal (MIM) capacitor structure comprising:
A metal-insulator-metal (MIM) capacitor structure comprising:
A metal-insulator-metal (MIM) capacitor structure comprising:
Dependencies are inferred from the claim text.