Sputter target backing plate assemblies with cooling structures

A method of forming a monolithic backing plate for use with a sputtering target, the method comprising:

• using additive manufacturing to form a three dimensional structure of continuous material including
• forming a substantially planar first side in a first plane, the first side having a first surface and a second surface and a thickness between the first and second surface in a direction perpendicular to the first plane;
• forming a plurality of flow barriers joined to the second surface of the first side, the plurality of flow barriers elongated in a direction parallel to the first plane and having a thickness in a direction perpendicular to the first plane;
• forming a plurality of flow channels defined between the plurality of flow barriers and including at least one liquid input and at least one liquid output in fluid communication with the plurality of flow channels;
• and
• forming a substantially planar second side in the first plane, the second side having a first surface joined to the plurality of flow barriers and a second surface and a thickness between the first and second surface in a direction perpendicular to the first plane, and
• solidifying the material such that the backing plate comprises a uniform, continuous material structure throughout the first side, the plurality of flow barriers, and the second side.

A method of forming a sputtering target backing plate of continuous material using additive manufacturing, the method comprising:

• repeatedly depositing material layer by layer in a first plane;
• and
• solidifying the deposited material to a previously solidified layer to form
• a substantially planar first side in the first plane, the first side having a first surface and a second surface defining a thickness between the first and second surface in a direction perpendicular to the first plane;
• a plurality of flow barriers joined to the second surface of the first side, the plurality of flow barriers extended in a direction parallel to the first plane and having a thickness in a direction perpendicular to the first plane;
• defining a plurality of flow channels with the plurality of flow barriers;
• and
• a substantially planar second side in the first plane, the second side having a first surface joined to the flow barriers and a second surface defining a thickness between the first and second surface in a direction perpendicular to the first plane,
• wherein the plurality of flow channels are shaped to flow a cooling fluid throughout the backing plate between the second surface of the first side and the first surface of the second side, and
• wherein the backing plate comprises an integrally uniform material throughout the first side, the plurality of flow barriers, and the second side.

A sputtering target backing plate comprising:

• a first side having a unitary structure formed of a substantially planar continuous material in a first plane and having a first surface and a second surface and a thickness between the first and second surface in a direction perpendicular to the first plane;
• a second side having a unitary structure formed of a substantially planar continuous material in the first plane and having a first surface and a second surface and a thickness between the first and second surface in a direction perpendicular to the first plane;
• a plurality of support barriers joined to the second surface of the first side and the first surface of the second side, the plurality of support barriers having a thickness in the direction perpendicular to the first plane, and elongated in a direction parallel to the first plane such that each of the plurality of support barriers has a length greater than a width in a direction parallel to the first plane;
• a plurality of flow channels defined by the first side, the second side, and the plurality of support barriers and including a liquid entrance and a liquid exit, such that a liquid can enter the liquid entrance, flow parallel the first plane between the first side and second side, and exit the liquid exit;
• wherein the backing plate comprises a continuously formed material from the first side, the plurality of support barriers, and the second side.