Charged particle beam apparatus, observation method using charged particle beam apparatus, and program

A charged particle beam apparatus comprising:

• an optical system that irradiates a sample mounted on a sample stage with a charged particle beam;
• at least one detector that detects a signal which is generated from the sample;
• an imaging device that acquires an observation image from the detected signal;
• a mechanism for changing observation positions in the sample which has at least one of a stage that moves the sample stage and a deflector that changes an irradiation position of the charged particle beam;
• a display unit that displays an operation screen provided with an observation image displaying portion that displays the observation image and an observation position displaying portion that displays an observation position of the observation image;
• and
• a controller that controls display processing of the operation screen,
• wherein the controller causes a plurality of observation position displaying images at different magnifications to be superimposed and displayed on the observation position displaying portion, based on magnifications and coordinates at which the observation images are acquired.