Actuator Apparatus, Electronic Device, And Control Method

An actuator apparatus comprising:

• a first substrate;
• a second substrate that faces the first substrate;
• a first reflecting film that is disposed on the first substrate;
• a second reflecting film that is disposed on the second substrate, the second reflecting film facing the first reflecting film;
• a plurality of bias electrostatic actuators that is disposed so as to surround the first reflecting film and the second reflecting film in plan view;
• a control electrostatic actuator that is disposed so as to surround the first reflecting film and the second reflecting film in plan view;
• a gap detector that detects a gap between the first reflection film and the second reflection film based on a capacitance between the first reflection film and the second reflection film;
• and
• a driving controller that controls the plurality of bias electrostatic actuators and the control electrostatic actuator, the driving controller applying a bias voltage to one of the plurality of bias electrostatic actuators, the driving controller applying a feedback voltage to the control electrostatic actuator, the feedback voltage being generated based on the capacitance,
• the driving controller deriving a driving parameter to drive the one of the plurality of bias electrostatic actuators based on a voltage supplied to each of the plurality of bias electrostatic actuators and the gap at a time of the supply of the voltage thereto.