Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method

An exposure apparatus that performs scanning exposure of an object by relatively driving the object with respect to an optical system, the apparatus comprising:

• a first movable body that holds the object and is movable in a first direction and a second direction intersecting each other;
• a reference member serving as a reference for movement of the first movable body in the first direction and the second direction;
• a second movable body disposed between the first movable body and the reference member, and movable in the second direction;
• a first measurement system that acquires position information of the first movable body in the first direction with respect to the reference member, with a first head disposed at one of the first movable body and the second movable body and a first scale disposed at the other of the first movable body and the second movable body that can measure a movement range of the first movable body in the first direction at the time of the scanning exposure;
• and
• a second measurement system that acquires position information of the first movable body in the second direction with respect to the reference member, with a second head disposed at one of the second movable body and the reference member and a second scale disposed at the other of the second movable body and the reference member that can measure a movement range of the first movable body in the second direction at the time of the scanning exposure.