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US 2018/0321584 A1Published application
Mold, imprint device, and imprint method
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsAKIHIRO ISHIKAWA, TOSIHIKO WADA, TEPPEI IWASE
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Abstract
A mold includes a rugged pattern layer, an inorganic sheet layer, and an elastic sheet layer. The inorganic sheet layer is formed of an inorganic material and supports the rugged pattern layer. The elastic sheet layer supports the inorganic sheet layer.
Claims12
A mold comprising:
- a rugged pattern layer;
- an inorganic sheet layer that is formed of an inorganic material and supports the rugged pattern layer;
- and
- an elastic sheet layer that supports the inorganic sheet layer.
1 more element
Dependencies are inferred from the claim text.