Sensor systems and related fabrication techniques

A method comprising:

• placing a sensor device on a surface of an object, wherein (i) the sensor device includes a sensor array disposed on a flexible polymer substrate, (ii) the sensor array includes a plurality of transparent sensor circuits, (iii) a surface of the flexible polymer substrate is in contact with and conforms to at least a portion of the surface of the object, and (iv) each of the transparent sensor circuits is disposed at a respective location adjacent to the surface of the object;
• detecting electrical signals from the transparent sensor circuits;
• and
• determining parameters at the respective locations adjacent to the surface of the object based on the electrical signals.

A method for fabricating an integrated circuit, the method comprising the steps of:

• forming a layer of a first material on a substrate;
• depositing an electron-beam resist layer of a multilayer etch mask on the first material layer;
• depositing a photoresist layer of the multilayer etch mask on the electron-beam resist layer, wherein the electron-beam resist layer and the photoresist layer of the multilayer etch mask comprise different materials;
• defining a pattern in the photoresist layer, thereby uncovering portions of the electron-beam resist layer;
• and
• developing the uncovered portions of the electron-beam resist layer of the multilayer etch mask, thereby defining the pattern in the electron-beam resist layer.