3D Micro and Nanoheater Design for Ultra-Low Power Gas Sensors
AssigneeInternational Business Machines Corporation
InventorsJosephine B. Chang, Hendrik F. Hamann, Siyuan Lu, Xiaoyan Shao
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Abstract
High-efficiency, ultra-low power gas sensors are provided. In one aspect, a gas detector device is provided which includes: at least one gas sensor having a plurality of fins; a conformal resistive heating element on the fins; a conformal barrier layer on the resistive heating element; and a conformal sensing layer on the barrier layer. A method of forming a gas sensor as well as a method for use thereof in gas detection are also provided.
Claims20
A method of gas detection, the method comprising the steps of:
- providing a gas detector device having at least one gas sensor comprising:
- a plurality of fins;
- a conformal resistive heating element on the fins;
- a conformal barrier layer on the resistive heating element;
- and a conformal sensing layer on the barrier layer;
- heating the gas sensor via the resistive heating element;
- and
- taking readings from the gas sensor.
A method of gas detection, the method comprising the steps of:
- providing a gas detector device having at least one gas sensor comprising:
- a plurality of fins;
- a conformal resistive heating element on the fins;
- a conformal barrier layer on the resistive heating element;
- and a conformal sensing layer on the barrier layer, wherein the conformal resistive heating element, the conformal barrier layer and the conformal sensing layer each conforms to a shape of the fins thereby providing a plurality of gas sensor layers disposed conformally over the fins with a gap present between the gas sensor layers over adjacent fins;
- heating the gas sensor via the resistive heating element;
- and
- taking readings from the gas sensor.
Dependencies are inferred from the claim text.