US 2018/0321161 A1 · THREE-DIMENSIONAL OBJECT INSPECTING DEVICE

Abstract

A three-dimensional object inspecting device for inspecting a three-dimensional object includes a light source, a detector, an orientation information acquisition component, a three-dimensional shading corrector, and an inspection component. The light source emits light energy toward an inspection region set for the three-dimensional object. The detector detects radiant energy radiated from the inspection region. The orientation information acquisition component acquires orientation information about the light source and the detector with respect to the inspection region. The three-dimensional shading corrector performs three-dimensional shading correction on information corresponding to the radiant energy detected by the detector, based on shape information about the three-dimensional object in the inspection region, the orientation information, and shading correction information for a planar image detected by the detector for each of a plurality of working distances. The inspection component performs an inspection based on the information on which the three-dimensional shading correction has been performed.

Claims14

Dependent claims

A three-dimensional object inspecting device for inspecting a three-dimensional object, the three-dimensional object inspecting device comprising:

a light source configured to emit light energy toward an inspection region set for the three-dimensional object;
a detector configured to detect radiant energy radiated from the inspection region;
an orientation information acquisition component configured to acquire orientation information about the light source and the detector with respect to the inspection region;
a three-dimensional shading corrector configured to perform three-dimensional shading correction on information corresponding to the radiant energy detected by the detector, based on shape information about the three-dimensional object in the inspection region, the orientation information about the light source and the detector with respect to the inspection region, and shading correction information for a planar image detected by the detector for each of a plurality of working distances;
and
an inspection component configured to perform an inspection based on the information on which the three-dimensional shading correction has been performed.

3 more elements

A three-dimensional object inspecting device for inspecting a deposit attached to a surface of a three-dimensional object, the three-dimensional object inspecting device comprising:

a light source configured to emit light energy toward an inspection region set for the three-dimensional object;
a detector configured to detect radiant energy radiated from the deposit in the inspection region;
an orientation information acquisition component configured to acquire orientation information about the light source and the detector with respect to the inspection region;
a three-dimensional shading corrector configured to perform three-dimensional shading correction on information corresponding to the radiant energy detected by the detector, based on shape information about the three-dimensional object in the inspection region, orientation information about the light source and the detector with respect to the inspection region, and shading correction information for a planar image detected by the detector for each of a plurality of working distances;
and
a deposit inspection component configured to perform an inspection of the deposit based on the information on which the three-dimensional shading correction has been performed.

3 more elements

Dependencies are inferred from the claim text.

Three-dimensional object inspecting device

Life of this patent

Three-dimensional object inspecting device

Life of this patent

Abstract

Claims14