Oscillating device
AssigneeKokusai Keisokuki Kabushiki Kaisha
InventorsSigeru MATSUMOTO, Hiroshi MIYASHITA, Kazuhiro MURAUCHI
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Abstract
An oscillating device including a vibrating table, an actuator configured to oscillate the vibrating table in a first direction, a coupling mechanism configured to couple the vibrating table with the actuator in such a manner that the vibrating table is movable relative to the actuator in a second direction orthogonal to the first direction, and a counter balancer attached to the vibrating table and configured to compensate an imbalance of an oscillated portion including at least the vibrating table, the imbalance being caused by attaching the coupling mechanism to the vibrating table.
Claims15
An oscillating device, comprising:
- a vibrating table;
- an actuator configured to oscillate the vibrating table in a first direction;
- a coupling mechanism configured to couple the vibrating table with the actuator in such a manner that the vibrating table is movable relative to the actuator in a second direction orthogonal to the first direction;
- and
- a counter balancer attached to the vibrating table and configured to compensate an imbalance of an oscillated portion including at least the vibrating table, the imbalance being caused by attaching the coupling mechanism to the vibrating table.
An oscillating device, comprising:
- a vibrating table;
- an X-axis actuator configured to oscillate the vibrating table in an X-axis direction;
- a Y-axis actuator configured to oscillate the vibrating table in a Y-axis direction;
- a Z-axis actuator configured to oscillate the vibrating table in a Z-axis direction;
- wherein the X-axis direction, the Y-axis direction and the Z-axis direction are orthogonal to each other,
- a YZ coupling mechanism configured to couple the vibrating table with the X-axis actuator in such a manner that the vibrating table is movable relative to the X-axis actuator in the Y-axis direction and the Z-axis direction;
- a ZX coupling mechanism configured to couple the vibrating table with the Y-axis actuator in such a manner that the vibrating table is movable relative to the Y-axis actuator in the Z-axis direction and the X-axis direction;
- an XY coupling mechanism configured to couple the vibrating table with the Z-axis actuator in such a manner that the vibrating table is movable relative to the Z-axis actuator in the X-axis direction and the Y-axis direction;
- a first counter balancer attached to the vibrating table and configured to compensate a first imbalance of an oscillated portion including at least the vibrating table, the first imbalance being caused by attaching the YZ coupling mechanism to the vibrating table;
- a second counter balancer attached to the vibrating table and configured to compensate a second imbalance of the oscillated portion, the second imbalance being caused by attaching the ZX coupling mechanism to the vibrating table;
- and
- a third counter balancer attached to the vibrating table and configured to compensate a third imbalance of the oscillated portion, the third imbalance being caused by attaching the XY coupling mechanism to the vibrating table.
An oscillating device, comprising:
- a vibrating table;
- an actuator configured to oscillate the vibrating table in a first direction;
- and
- a coupling mechanism configured to couple the vibrating table with the actuator in such a manner that the vibrating table is movable relative to the actuator in a second direction orthogonal to the first direction,
- wherein the vibrating table includes a predetermined imbalance previously provided thereto, the predetermined imbalance being set to make a center of gravity of an oscillated portion to be oscillated by the actuator positionally coincide with a center of an outer shape of the vibrating table, the oscillated portion including the vibrating table and a part of the coupling mechanism.
Dependencies are inferred from the claim text.