Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel
AssigneeKabushiki Kaisha Toshiba
InventorsYoshihiko FUJI, Hideaki Fukuzawa, Akio Hori, Shiori Kaji
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AssigneeKabushiki Kaisha Toshiba
InventorsYoshihiko FUJI, Hideaki Fukuzawa, Akio Hori, Shiori Kaji
Estimating the term…
A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.
-19. (canceled)
A strain detection element configured to be fixed to a membrane being deformable, the strain detection element comprising:
A strain detection element configured to be fixed to a membrane being deformable, the strain detection element comprising:
Dependencies are inferred from the claim text.