Electromagnetic radiation detector encapsulated by transfer of thin layer
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsPatrick Leduc, Jean-Jacques Yon
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsPatrick Leduc, Jean-Jacques Yon
Estimating the term…
An electromagnetic radiation detector comprising: at least one membrane suspended above a substrate; and a cap, closing a hermetic cavity including the at least one membrane. According to the invention: the thickness of the cap is less than or equal to 10 μm; the cap bears at least on support walls surrounding the membrane(s); and the detector has first and second metallic sealing layers intercalated on each other between the cap and the support walls, and between which a peripheral bonding zone extends. The invention also relates to a method of making such a detector. The invention provides an encapsulation solution using a thin cap, in which the membranes are not subjected to high temperatures.
Electromagnetic radiation detector (100) comprising:
Method of encapsulating at least one sensitive element of an electromagnetic radiation detector (100), characterised in that it comprises the following steps:
Dependencies are inferred from the claim text.