Optical sensor system

Abstract

An optical sensor system includes an optical sensor arrangement that includes a Fabry-Perot structure having two reflective surfaces spaced apart at a distance from each other. A spectral acquisition arrangement acquires successive spectral responses from the optical sensor arrangement during successive time intervals. A spectral analysis arrangement detects a periodicity in at least one of the successive spectral responses that have been acquired. The spectral analysis arrangement further detects a phase evolution of the periodicity throughout the successive spectral responses. The phase evolution of the periodicity provides a relatively precise measurement of a variation in an optical path length between the two reflective surfaces of the Fabry-Perot structure. A variation in a physical quantity can cause the variation in the optical path length. Accordingly, a relatively precise measurement of the physical quantity can be achieved.

Dependencies are inferred from the claim text.