Comb-driven substrate decoupled annulus pitch/roll baw gyroscope with slanted quadrature tuning electrode

A bulk acoustic wave pitch/roll gyroscope, comprising:

• an annulus-shaped resonator member;
• respective anchor structures coupling the annulus-shaped resonator member to a substrate;
• and
• a comb-drive element connected to the annulus-shaped resonator member, the comb-drive element comprising first comb fingers protruding from the annulus-shaped resonator member, and second comb fingers comprising a different material than the first comb fingers interdigitated therewith to define capacitive gaps of less than about 500 nanometers (nm) therebetween, respective sidewalls of the second comb fingers being oppositely-tapered relative to respective sidewalls of the first comb fingers between opposing ends thereof such that operation of the comb-drive element varies the capacitive gaps therebetween,
• wherein a resonance frequency of the gyroscope is greater than about 300 kilohertz (kHz).