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US 2018/0320739 A1Published application
Axially compliant bearing for precision positioning
AssigneeThe Regents of the University of Michigan
InventorsChinedum E. OKWUDIRE, Deokkyun D. YOON, Xin DONG
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Abstract
An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the stage in the axial direction while remaining stiff in other directions orthogonal to the axial direction.
Claims20
An axially compliant bearing stage assembly comprising:
- a base having a rail;
- a stage;
- at least one bearing member slidably disposed along the rail for movement in an axial direction;
- a compliant joint interconnecting the at least one bearing member to the stage, the compliant joint having a first compliance in the axial direction to permit movement of the stage in the axial direction relative to the at least one bearing, the first compliance being greater than a friction induced compliance of the at least one bearing member in the axial direction, the compliant joint having a second compliance in a direction orthogonal to the axial direction, the second compliance being less than the first compliance;
- an actuator for actuating the stage;
- and
- a sensor for measuring motion of the stage.
4 more elements
Dependencies are inferred from the claim text.