Acoustic transducer and microphone using the acoustic transducer

An acoustic transducer, comprising:

• a substrate having an opening, the opening having a first dimension in a first direction;
• a vibrating electrode overlapping the opening in the substrate and overlapping a portion of the substrate, the vibrating electrode having a second dimension in the first direction that is greater than the first dimension, the vibrating electrode having a main vibrating portion and a side vibrating portion, the side vibrating portion having a surface area that is smaller than a surface area of the main vibrating portion, the side vibrating portion extending from one side of the main vibrating portion;
• and
• a fixed membrane having a fixed electrode overlapping the opening in the substrate, the vibrating electrode being positioned between the fixed membrane and the substrate, the fixed membrane having a third dimension in the first direction that is greater than the second dimension.

An acoustic transducer, comprising:

• a substrate having an opening configured to receive a sound wave, the opening having a first dimension along a first direction;
• a vibrating electrode suspended over the opening of the substrate and extending along the first direction, the vibrating electrode having a second dimension along the first direction that is greater than the first dimension;
• a plurality of supports that couple the vibrating electrode to the substrate, the plurality of supports being arranged adjacent to a periphery of the vibrating electrode and defining a gap between the periphery of the vibrating electrode and the substrate;
• and
• a fixed membrane coupled to the substrate and extending over the vibrating electrode and the opening, the fixed membrane including:
• a first fixed electrode overlying a central portion of the vibrating electrode, and
• a second fixed electrode overlying a peripheral portion of the vibrating electrode.

An acoustic transducer, comprising:

• a substrate having an opening configured to receive a sound wave, the opening having a first dimension along a first direction;
• a vibrating electrode suspended over the opening of the substrate and extending along the first direction, the vibrating electrode having a second dimension along the first direction that is greater than the first dimension;
• a fixed membrane coupled to the substrate and extending over the vibrating electrode and the opening, the fixed membrane including:
• a first fixed electrode overlying a central portion of the vibrating electrode, and
• a second fixed electrode overlying a peripheral portion of the vibrating electrode;
• and
• a plurality of supports that couple the vibrating electrode to the fixed membrane.