Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods

An equipment front end module, comprising:

• a cabinet including an equipment front end module chamber subject to environmental controls, the cabinet including a wall with and interface opening;
• and
• an equipment front end module interface coupled to the wall, the equipment front end module interface comprising:
• a first mounting member configured to couple to a load lock assembly, and
• a flexible seal coupled to the first mounting member, the flexible seal including a sealing flange that is sealed around the interface opening.

A method of assembling a load lock assembly to an equipment front end module, comprising:

• providing a load lock assembly;
• providing an equipment front end module including a cabinet with an equipment front end module chamber subject to environmental controls, the cabinet including a wall and an interface opening in the wall;
• providing an equipment front end module interface including a first mounting member and a flexible seal coupled to the first mounting member, the flexible seal including a sealing flange;
• coupling and sealing the sealing flange around the interface opening and coupling the first mounting member to the load lock assembly to seal between the load lock assembly and the wall of the cabinet;
• and
• accommodating any misalignment present between the load lock assembly and the equipment front end module with the flexible seal.