Thin silicon substrate fabrication directly from silicon melt
AssigneeBoard of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada
InventorsGhassan Jabbour, Hyung Woo Choi, Dhanesh Chandra, Mo Masoumi Danyan
Life of this patent
Estimating the term…
Abstract
Disclosed herein are embodiments of systems and methods for making silicon substrates. The disclosed systems use a unique combination of induction heating and crucible materials to produce silicon substrates in short time periods. The disclosed methods are cost-efficient and time-efficient and can be used to obtain pure silicon substrates having a desirable thinness for commercial use.
Claims10
A system for making silicon substrates, comprising:
- an induction heater;
- a crucible comprising graphite and having a vertical axis, wherein the crucible does not comprise a plurality of vertical slits;
- a cooling wheel having a circumferential surface configured to rotate along an axis perpendicular to the vertical axis of the crucible;
- and
- a reaction chamber.
A system for making silicon substrates, comprising:
- a crucible consisting of graphite and having a vertical axis, wherein the crucible does not comprise a plurality of vertical slits;
- an induction heater positioned to surround at least a portion of the crucible;
- a copper cooling wheel having a circumferential surface configured to rotate along an axis perpendicular to the vertical axis of the crucible and positioned proximal to the crucible;
- and
- a reaction chamber that surrounds the crucible, the induction heater, and the copper cooling wheel.
A method for making silicon substrates, comprising:
- introducing a silicon substrate precursor into a crucible comprising graphite and having a vertical axis, wherein the crucible does not comprise a plurality of vertical slits;
- heating the silicon substrate precursor to form molten silicon using an induction heater that surrounds at least a portion of the crucible;
- and
- cooling the molten silicon on a cooling wheel having a circumferential surface that is positioned proximal to the crucible by distributing the molten silicon along the vertical axis of the crucible onto the circumferential surface of the cooling wheel as it rotates along an axis perpendicular to the vertical axis of the crucible.
Dependencies are inferred from the claim text.