Multilayer ceramic substrate and method for manufacturing multilayer ceramic substrate
AssigneeMurata Manufacturing Co., Ltd.
InventorsTomoki Kato, Sadaaki Sakamoto
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Abstract
A multilayer ceramic substrate that includes a laminate having stacked ceramic layers formed of a ceramic material containing a main component, containing 48 to 75% by weight of Si, 20 to 40% by weight of Ba, and 10 to 40% by weight of Al, and an auxiliary component containing at least 2.5 to 20 parts by weight of Mn with respect to 100 parts by weight of the main component, and in the laminate, glass ceramic layers in which the entire or a portion of the thickness thereof exists within 100 μm inside of the laminate as measured from opposed principal surfaces are further stacked.
Claims20
A multilayer ceramic substrate comprising:
- a laminate having a plurality of stacked ceramic layers, an internal electrode disposed between predetermined layers of the plurality of ceramic layers,
- wherein the ceramic layers comprise a ceramic material having a main component containing 48 to 75% by weight of Si, 20 to 40% by weight of Ba, and 10 to 40% by weight of Al, and an auxiliary component containing at least 2.5 to 20 parts by weight of Mn with respect to 50 parts by weight of the main component;
- and
- a first glass ceramic layer in the laminate, wherein at least a portion of a thickness of the first glass ceramic layer exists within 100 μm inside of the laminate measured from a first principal surface of the laminate.
A method for manufacturing a multilayer ceramic substrate, the method comprising:
- preparing a plurality of ceramic green sheets, the ceramic green sheets being formed from a material having a main component containing 48 to 75% by weight of Si, 20 to 40% by weight of Ba, and 10 to 40% by weight of Al, and an auxiliary component containing at least 2.5 to 20 parts by weight of Mn with respect to 100 parts by weight of the main component;
- applying a glass ceramic slurry onto a principal surface of predetermined first sheet of the plurality of ceramic green sheets;
- applying a conductive paste in a predetermined shape onto a principal surface at least one of the plurality of ceramic green sheets having no glass ceramic layer thereon and the predetermined first sheet of the plurality of ceramic green sheets on which the glass ceramic layer is formed, such that the conductive paste has a predetermined shape;
- stacking the plurality of ceramic green sheets, including the predetermined first sheet of the plurality of ceramic green sheets having the glass ceramic slurry applied thereon and the at least one of the plurality of ceramic green sheets with the conductive paste applied thereon, in a predetermined order to produce an unfired laminate;
- sandwiching opposed principal surfaces of the unfired laminate between a pair of constraining layers and pressure-bonding the unfired laminate;
- firing the unfired laminate in a state where pressure is applied to the unfired laminate to produce a fired laminate having a plurality of stacked ceramic layers, an internal electrode, and a first glass ceramic layer having at least a portion of a thickness thereof within 100 inside of the fired laminate as measured from a first principal surface of the fired laminate;
- and
- removing the constraining layers from the fired laminate.
Dependencies are inferred from the claim text.