Heat generation element and method for producing same
AssigneeKirin Kabushiki Kaisha
InventorsHiroyasu TABUCHI, Tsutomu AMANO, Masaki NAKAYA
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Abstract
An object of the disclosure is to provide a heat generation element having high durability and a method of manufacturing the same. A heat generation element 1 according to the disclosure includes a first layer 2 having a metallic tantalum phase, and a second layer 3 which covers a periphery of the first layer 2 and has a tantalum carbide phase, wherein a concentration of silicon in an interface portion 4 between the first layer 2 and the second layer 3 is higher than a concentration of silicon in a portion other than the interface portion 4.
Claims6
A heat generation element comprising:
- a first layer having a metallic tantalum phase;
- and
- a second layer which covers a periphery of the first layer and has a tantalum carbide phase,
- wherein a concentration of silicon in an interface portion between the first layer and the second layer is higher than a concentration of silicon in a portion other than the interface portion.
A method of manufacturing a heat generation element, the method comprising:
- an installation step of installing a base material containing tantalum as a main component in a vacuum chamber;
- and
- a heating step of introducing a silicon-containing hydrocarbon gas into the vacuum chamber, heating the base material installed in the vacuum chamber, and introducing a silicon atom from an outer surface of the base material into an inside of the base material.
Dependencies are inferred from the claim text.