Electronic component
AssigneeMurata Manufacturing Co., Ltd.
InventorTakashi IWAMOTO
Life of this patent
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Abstract
An electronic component includes a piezoelectric substrate, a functional electrode on the piezoelectric substrate, a support layer on the piezoelectric substrate, a cover layer on the support layer, the cover layer, the support layer, and the piezoelectric substrate defining a hollow space that the functional electrode faces, and connection terminals that are electrically connected to the functional electrode, that are each made from a metal particle aggregate, and that each have a porous structure. The connection terminals are each located at a position in which the connection terminals overlap at least a portion of the hollow space in plan view.
Claims19
An electronic component comprising:
- a piezoelectric substrate;
- a functional electrode that is disposed on the piezoelectric substrate;
- a support layer that is disposed on the piezoelectric substrate;
- a cover layer that is disposed on the support layer, the cover layer, the support layer, and the piezoelectric substrate defining a hollow space that the functional electrode faces;
- and
- a connection terminal that is electrically connected to the functional electrode, that is made from a metal particle aggregate, and that has a porous structure;
- wherein
- the connection terminal is located at a position in which the connection terminal overlaps at least a portion of the hollow space in plan view.
Dependencies are inferred from the claim text.