Led chip with integrated electromechanical switch

A method of producing an LED chip having an integrated electrostatic switch, the method comprising:

• providing an LED structure on a semiconductor substrate, comprising providing a first semiconductor layer and a second semiconductor layer over the first semiconductor layer, each semiconductor layer having a top surface and a bottom surface, and the second semiconductor layer partially covers the top surface of the first semiconductor layer;
• providing first and second external terminals and connecting the LED structure between the two;
• forming a channel between the top and bottom surface of the lower semiconductor layer, thereby providing a lower semiconductor layer having two electrically isolated sub-portions, the two sub-portions connected at their bottom surface by the substrate;
• providing a suspended beam electrostatic switch in series with the LED structure between the first and second external terminals, or in parallel with the LED structure;
• providing a control electrode for controlling the suspended beam electrostatic switch;
• providing a third external terminal and connecting said terminal to the control electrode;
• and
• providing an internal terminal on the top surface of one sub-portion of the lower semiconductor layer,
• the second external terminal being provided on the top surface of the alternate sub-portion of the lower semiconductor layer, and the control electrode being provided on a surface within the dividing channel.