US 2018/0026138 A1 · TFT circuit board and display device having the same

Abstract

The invention allows stable fabrication of a TFT circuit board used in a display device and having thereon an oxide semiconductor TFT. A TFT circuit board includes a TFT that includes an oxide semiconductor. The TFT has a gate insulating film formed on part of the oxide semiconductor and a gate electrode formed on the gate insulating film. A portion of the oxide semiconductor that is covered with the gate electrode 104 and a portion of the oxide semiconductor that is not covered with the gate electrode are both covered with a first interlayer insulating film. The first interlayer insulating film is covered with a first film 106, and the first film is covered with a first AlO film.

Claims20

Dependent claims

A TFT circuit board comprising thereon a TFT that includes an oxide semiconductor, wherein:

the TFT has a gate insulating film formed on the oxide semiconductor and a gate electrode formed on the gate insulating film;
and
a portion, of the oxide semiconductor, that is covered with the gate electrode and a portion, of the oxide semiconductor, that is not covered with the gate electrode are covered with a first interlayer insulating film, the first interlayer insulating film being covered with a first film, the first film being covered with a first AlO film.

Dependencies are inferred from the claim text.

Facts

Application

15/649,126Filed 13 Jul 2017

Priority

JP 2016-14122819 Jul 2016

Published

25 Jan 2018

Term ends

Not estimatedThe source records don’t support an estimate.

Classification11 codes

H10D 30/6755
Characterised by the active materials: oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
H10D 30/673
Characterised by the electrodes: characterised by the shapes, relative sizes or dispositions of the gate electrodes
H10D 30/6739
Characterised by the electrode materials: conductor-insulator-semiconductor electrodes
H10D 64/01
Electrodes of devices having potential barriers: manufacture or treatment

TFT circuit board and display device having the same

Life of this patent

TFT circuit board and display device having the same

Life of this patent

Abstract

Claims20