Electrical antifuse
AssigneeInternational Business Machines Corporation
InventorChih-Chao Yang
Life of this patent
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Abstract
An antifuse structure including a first electrode that is present in at a base of the opening in the dielectric material. The antifuse structure further includes an antifuse material layer comprising a phase change material alloy of tantalum and nitrogen. A first surface of the antifuse material layer is present in direct contact with the first electrode. A second electrode is present in direct contact with a second surface of the antifuse material layer that is opposite the first surface of the antifuse material layer.
Claims20
An antifuse structure comprising:
- a first electrically conductive material;
- an antifuse material layer comprising a phase change material alloy of tantalum, the antifuse material layer having a first surface present in direct contact with the first electrically conductive material;
- and
- a second electrically conductive material in direct contact with a second surface of the at least the antifuse material layer.
An antifuse structure comprising:
- a first electrically conductive material;
- a diffusion barrier atop the first electrically conductive material;
- an antifuse material layer atop the diffusion barrier, the antifuse material layer comprising a phase change material alloy of tantalum, the antifuse material layer having a first surface present in direct contact with the first electrically conductive material;
- and
- a second electrically conductive material in direct contact with a second surface of the at least the antifuse material layer.
An antifuse structure comprising:
- a first electrically conductive material;
- an antifuse material layer comprising a phase change material alloy of tantalum and nitrogen, the antifuse material layer having a first surface present in direct contact with the first electrically conductive material;
- and
- a second electrically conductive material in direct contact with a second surface of the at least the antifuse material layer.
Dependencies are inferred from the claim text.