Information processing device, processing device, prediction method, program, and processing method

A processing device comprising:

• a base shape storage unit that stores a shape of a sample etched within a chamber as a base shape;
• a physical quantity prediction unit that predicts a physical quantity within the chamber on the basis of a processing condition determined for the sample and associated with the physical quantity and the base shape;
• a processing unit that processes the sample on the basis of the processing condition;
• and
• a control unit that changes the processing condition on the basis of the predicted physical quantity, and supplies the changed processing condition to the processing unit as a new processing condition.

A processing method comprising:

• a reading step that reads abase shape from a base shape storage unit that stores a shape of a sample etched within a chamber as the base shape;
• a physical quantity prediction step that predicts a physical quantity within the chamber on the basis of a processing condition determined for the sample and associated with the physical quantity and the base shape read from the base shape storage unit;
• a processing step performed by a processing unit to process the sample on the basis of the processing condition;
• and
• a control step that changes the processing condition on the basis of the predicted physical quantity, and supplies the changed processing condition to the processing unit as a new processing condition.