Substrate processing apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsHyoJoong Kim, Kyungsun Seo, Jongho Choi
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Abstract
A substrate processing apparatus includes an outer tube including an open bottom portion and a closed top portion, and an inner tube disposed in the outer tube and spaced apart from the outer tube. The inner tube includes a first opening at a top portion of the inner tube, a second opening at a bottom portion of the inner tube, and an inner sidewall including a plurality of exhaust holes on one side of the inner sidewall, the inner sidewall defining the first and second openings.
Claims20
A substrate processing apparatus, the apparatus comprising:
- an outer tube including an open bottom portion and a closed top portion;
- and
- an inner tube disposed in the outer tube and spaced apart from the outer tube,
- wherein the inner tube comprises:
- a first opening at a top portion of the inner tube;
- a second opening at a bottom portion of the inner tube;
- and
- an inner sidewall including a plurality of exhaust holes on one side of the inner sidewall, the inner sidewall defining the first and second openings of the inner tube.
A substrate processing apparatus, the apparatus comprising:
- a chamber that is configured to accommodate a boat in which wafers are loaded in a multiple layer arrangement;
- and
- a gas exhaust member that produces a pressure in the chamber of 10 Torr or more and exhausts a gas from the chamber,
- wherein the chamber comprises:
- an inner tube having open top and bottom portions and an inner sidewall including a plurality of exhaust holes;
- and
- an outer tube surrounding the top portion and the inner sidewall of the inner tube.
A substrate processing apparatus, the apparatus comprising:
- a chamber comprising:
- an inner tube including:
- an inner sidewall;
- a top opening defined by a top portion of the inner sidewall;
- a bottom opening defined by a bottom portion of the inner sidewall;
- and
- a plurality of exhaust holes defined in one side of the inner sidewall and extending between the bottom portion and the top portion of the inner sidewall;
- and
- an outer tube surrounding the inner sidewall and the top opening of the inner tube;
- and
- a gas exhaust member that is configured to produce a pressure of 10 Torr or more in the outer tube and is configured to exhaust a gas from the inner tube through the top opening and the plurality of exhaust holes.
Dependencies are inferred from the claim text.