Substrate processing apparatus

A substrate processing apparatus, comprising:

• a plurality of modules configured to process a substrate;
• a transfer chamber adjoining the modules;
• a transfer part configured to transfer the substrate to one of the modules;
• a reception part configured to receive process information of the substrate;
• a plurality of sensors, which is attached to the modules, configured to detect quality information of the respective modules, the quality information including quality information of components of the respective modules;
• a table in which a plurality of predetermined process information items are associated with a plurality of predetermined quality information items;
• a memory part configured to store the table;
• and
• a controller configured to select, from the plurality of the predetermined quality information items in the table, a quality information item based on the received process information, configured to compare the selected quality information item with the detected quality information, configured to select one of the modules corresponding to the received process information based on a result of the comparison, and configured to instruct the transfer part to transfer the substrate to the selected module.