P-type impurity-diffusing composition, method for manufacturing semiconductor device using said composition, solar cell, and method for manufacturing said solar cell
AssigneeToray Industries, Inc.
InventorsYoshihiro Ikegami, Seiichiro Murase, Sachio Inaba
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Abstract
A p-type impurity diffusion composition is provided which makes it possible to improve storage stability of a coating liquid, and to achieve uniform diffusion of the coating liquid on a semiconductor substrate. The p-type impurity diffusion composition includes (A) a group-13 element compound, (B) a hydroxyl-group-containing polymer, and (C) an organic solvent, (Cl) a cyclic ester solvent being contained in the organic solvent.
Claims13
A p-type impurity-diffusing composition comprising a group 13 element-containing compound (A), a hydroxyl group-containing polymer (B), and an organic solvent (C), wherein the organic solvent (C) comprises a cyclic ester solvent (C1).
Dependencies are inferred from the claim text.