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US 2018/0025804 A1Published application
Scratch Resistant Flexible Transparent Electrodes and Methods for Fabricating Ultrathin Metal Files as Electrodes
AssigneeUniversity of Houston System
InventorsZhifeng Ren, Chuanfei Guo, Yuan Liu
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Abstract
Systems and methods of fabricating electrodes, including thin metallic films, include depositing a first metallic layer on a substrate and passivating the deposited layer. The processes of deposition and passivation may be done sequentially. In some embodiments, a plurality of substrates may be coated with a metallic layer and further processed at a later time, including passivation and disposal of additional layers as discussed herein.
Claims19
A method of fabricating an electrode comprising:
- depositing a first metallic layer on a substrate;
- forming a first film on the first metallic layer;
- depositing a second metallic layer in contact with the first film;
- and
- forming a second film on the second metallic layer.
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An electrode comprising:
- a plurality of metallic layers deposited on a substrate;
- and
- an oxide layer between each adjacent pair of metallic layers, wherein the electrode comprises an optical transmittance of up to about 89%.
An electrode comprising:
- a plurality of metallic layers deposited on a substrate;
- and
- a plurality of passivated layers, wherein each passivated layer of the plurality is in between each adjacent pair of metal layers deposited on the substrate,
- wherein the electrode comprises an optical transmittance of up to about 89%.
1 more element
Dependencies are inferred from the claim text.