Cleaning Solution Mixing System With Ultra-Dilute Cleaning Solution And Method Of Operation Thereof

A cleaning solution mixing system comprising:

• an ultrapure water source for providing ultrapure water;
• an ammonia filter for filtering an amount of ammonia in gas form;
• a hydrogen peroxide filter for filtering hydrogen peroxide in gas form;
• an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water;
• a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water;
• and
• a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water.

A cleaning tool comprising:

• a cleaning solution mixing system including:
• an ultrapure water source for providing ultrapure water;
• an ammonia filter for filtering ammonia in gas form;
• a hydrogen peroxide filter for filtering hydrogen peroxide in gas form;
• an ammonia re-gas membrane for dissolving the ammonia in the ultrapure water and forming ultra-dilute ammoniated water;
• a hydrogen peroxide re-gas membrane for dissolving the hydrogen peroxide in the ultrapure water and forming ultra-dilute hydrogenated water;
• a mixer for forming an ultra-dilute cleaning solution by mixing the ultra-dilute ammoniated water and the ultra-dilute hydrogenated water;
• and
• a cleaning chamber coupled to the cleaning solution mixing system.