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US 2018/0024438 A1Published application
Support elements for an optical element
AssigneeCarl Zeiss SMT GmbH
InventorsJens Kugler, Ulrich Weber, Nicolai Wengert
Life of this patent
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Abstract
Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
Claims26
1-29. (canceled)
An optical module, comprising:
- an optical element;
- a support unit;
- a bipod supporting the optical element on the support unit;
- and
- an elongated lever having a longitudinal axis, a first lateral side and a second lateral side, wherein:
- the bipod comprises two bipod braces;
- each of the two braces has a first end defining a brace foot and a second end defining a brace head;
- each brace foot is connected to the support unit and each brace head is connected to the optical element so that at least one of brace heads and a connecting line connecting the brace feet span a bipod plane;
- the first and second lateral sides extend along the longitudinal axis;
- the lever is connected to the support unit via a bearing;
- the engages one of the two brace feet via a brace joint unit;
- a space between the brace feet along the connecting line is adjustable by a motion of the lever defined by the bearing;
- and
- along the longitudinal axis, an inner support part of the support unit extends between the optical element and the first lateral side.
11 more elements
Dependencies are inferred from the claim text.