Edge exposure apparatus
AssigneeMitsubishi Electric Corporation
InventorsNaoyuki TAKEDA, Shoichi KUGA
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Abstract
An edge exposure apparatus for exposure of an outer circumferential portion of a semiconductor substrate to light includes a light source provided to be able to emit light to the outer circumferential portion and a mirror having a reflection surface arranged to extend in a direction intersecting with an optical axis of light emitted from the light source. The mirror is provided between the outer circumferential portion and a center of the semiconductor substrate in a radial direction of the semiconductor substrate in exposure of the outer circumferential portion of the semiconductor substrate to light.
Claims9
An edge exposure apparatus for exposure of an outer circumferential portion of a semiconductor substrate to light, the edge exposure apparatus comprising:
- a light source provided to be able to emit light to the outer circumferential portion;
- and
- a mirror having a reflection surface arranged to extend in a direction intersecting with an optical axis of the light emitted from the light source,
- the mirror being provided between the outer circumferential portion and a center of the semiconductor substrate in a radial direction of the semiconductor substrate in exposure of the outer circumferential portion of the semiconductor substrate to light.
Dependencies are inferred from the claim text.