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US 2018/0024351 A1Published application
Opening angle measurement of an oscillating mems mirror
AssigneeSTMicroelectronics S.r.l.
InventorOffir Duvdevany
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AssigneeSTMicroelectronics S.r.l.
InventorOffir Duvdevany
Estimating the term…
A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.
A method of determining an opening angle of a movable MEMS mirror, the method comprising:
A picoprojector, comprising:
A picoprojector, comprising:
Dependencies are inferred from the claim text.