Probe module having cantilever mems probe and method of making the same

A probe module, comprising:

• a circuit substrate having a first surface on which an electric contact is provided, a second surface opposite to the first surface, and a through hole penetrating through the first and second surfaces;
• and
• a cantilever MEMS probe formed on the first surface of the circuit substrate by a MEMS fabrication process, the cantilever MEMS probe having a support post electrically and mechanically connected with the electric contact of the first surface, a cantilever arm connected with the support post, and a needle connected with the cantilever arm;
• wherein the through hole of the circuit substrate is in alignment with the needle and a part of the cantilever arm;
• when the cantilever arm of the cantilever MEMS probe receives an external force, the cantilever arm is curvedly bent with a bending value, which is defined as a distance that an end of the cantilever arm moves towards the second surface of the circuit substrate, and partially received in the through hole of the circuit substrate.