Acceleration sensor having spring force compensation

The acceleration sensor (200, 300) according to any one of the preceding claims, wherein

• the first trim electrodes (240, 340) are arranged symmetrically to a plane of symmetry perpendicular to the movement axis (x) on the sensor material (220, 320);
• and wherein
• the second trim electrodes (250, 350) are arranged symmetrically to the axis of symmetry perpendicular to the movement axis (x) on the substrate (210, 310).

The acceleration sensor (100) according to any one of the preceding claims, wherein

• the electrostatic force (145) generated by the first trim electrodes (140) and the second trim electrodes (150) is equal to the spring force (135) generated by the spring elements (130).

The acceleration sensor (200) according to any one of the preceding claims, wherein

• a part of the first trim electrodes (240) is formed as comb electrodes;
• and wherein
• the second trim electrodes (250) are formed as electrode plates.

The acceleration sensor (300) according to any one of the preceding claims, wherein

• a part of the first trim electrodes (340) is formed as electrode plates;
• and wherein
• the first trim electrodes (340), which are formed as electrode plates, and the associated second trim electrodes (350) form plate capacitors.

The acceleration sensor (100) according to any one of the preceding claims, wherein the acceleration sensor (100) is a micro-electro-mechanical system.