Image reconstruction method for x-ray measuring device, structure manufacturing method, image reconstruction program for x-ray measuring device, and x-ray measuring device
AssigneeNikon Corporation
InventorAtsushi YAMADA
Life of this patent
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Abstract
An image reconstruction method, includes: generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object; and generating an image using the differential data and the estimated structure.
Claims21
1-19. (canceled)
An image reconstruction method for an X-ray measuring device, comprising:
- generating differential data indicating a difference between detection data generated by detecting X-rays that passed through a measurement object by irradiating X-rays to the measurement object and estimate data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object;
- and generating an image using the differential data and the estimated structure.
An image reconstruction method for an X-ray measuring device, comprising:
- generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimated data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object;
- and
- determining, when the difference indicated by the differential data does not exceed a predetermined value, that the measurement object is a conforming product.
An image reconstruction program for an X-ray measuring device, which program causes a computer to execute processes, comprising:
- a differential data generation process for generating differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimated data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object;
- and
- an image generation process for generating an image using the differential data and the estimated structure.
An X-ray measuring device comprising:
- a generation unit that generates differential data indicating a difference between detection data generated by detecting X-ray that passed through a measurement object by irradiating X-rays to the measurement object and estimated data generated by estimating X-rays that are assumed to have been passed through an estimated structure having been generated by estimating a shape of the measurement object, wherein
- the generation unit generates an image using the differential data and the estimated structure.
Dependencies are inferred from the claim text.