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US 2018/0023947 A1Published application
Systems and methods for 3d surface measurements
AssigneeMura Inc.
InventorsLingfei Meng, Jun Jiang
Life of this patent
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Abstract
Certain embodiments are directed to 3D surface measurement systems and methods configured to direct engineered illumination of beams in one or more ray bundles to N illumination directions incident a sample surface. The systems and methods can measure a map of surface normals, a depth map, and a map of surface properties using intensity images captured while the engineered illumination is directed to the sample surface.
Claims26
A 3D surface measurement system comprising:
- an engineered illumination system configured to provide at least one ray bundle to N illumination directions incident a surface of a sample being imaged, wherein each ray bundle comprises illumination beams of various intensities;
- a first camera with an imaging lens and at least one sensor configured to capture intensity images at the N illumination directions based on light received from the illuminated sample;
- and
- a controller configured to execute instructions to:
- determine a sensor response at each sensor pixel from the intensity images at the N illumination directions;
- and
- match the sensor response at each sensor pixel to one of a plurality of predetermined sensor responses to determine a surface normal at each sensor pixel;
- and
- construct a map of surface normals of the surface by combining the determined surface normal of all the sensor pixels of the at least one sensor.
6 more elements
A 3D surface measurement method comprising:
- receiving a plurality of intensity images of a sample in a signal from at least one sensor of a camera, the plurality of intensity images captured at a plurality of exposure times at each illumination direction of N illumination directions of one or more ray bundles, each ray bundle comprising illumination beams of various intensities;
- determining a sensor response at each sensor pixel from the intensity images at the N illumination directions;
- matching a sensor response at each sensor pixel to one of a plurality of predetermined sensor responses to determine a surface normal at each sensor pixel;
- and
- construct a map of surface normals by combining the determined surface normal of all the sensor pixels of the at least one sensors.
2 more elements
A 3D surface measurement method comprising:
- a) engineering at least one ray bundle to N illumination directions incident a surface a sample being imaged, each ray bundle comprising illumination beams of various intensities;
- b) capturing, using at least one sensor of a camera, intensity images at a plurality of exposure times at each illumination direction based on light from the illuminated sample;
- and
- c) communicating the intensity images to one or more processors, wherein the processors determine a sensor response at each sensor pixel from the intensity images at the N illumination directions, match a sensor response at each sensor pixel to one of a plurality of predetermined sensor responses to determine a surface normal at each sensor pixel, and construct a map of surface normals by combining the determined surface normal of all the sensor pixels of the at least one sensor.
1 more element
A 3D surface measurement method comprising:
- engineering at least one ray bundle to N illumination directions incident a surface of a mirror or a chrome sphere, each ray bundle comprising illumination beams of various intensities;
- capturing, using at least one sensor of a camera, intensity images at each illumination direction based on light reflected from the mirror or the chrome sphere;
- and
- determining a calibration offset, system misalignment, or illumination directions based on the intensity images.
1 more element
Dependencies are inferred from the claim text.