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US 2018/0023942 A1Published application
Flexible Strain Sensors
AssigneeBoard of Regents, The University of Texas System
InventorsUday Tata, Smitha Rao, Jung-Chih Chiao
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Abstract
In one embodiment, a flexible strain sensor includes a flexible polymeric substrate having a top surface and a layer of amorphous carbon formed on the top surface of the substrate.
Claims20
A flexible strain sensor comprising:
- a flexible polymeric substrate having a top surface;
- and
- a layer of amorphous carbon formed on the top surface of the substrate.
A method for fabricating a flexible strain sensor, the method comprising:
- depositing piezoresistive amorphous carbon on a surface of a flexible substrate;
- and
- micro-machining the substrate to obtain a desired sensor shape.
An optical device comprising:
- a lens body;
- and
- a flexible strain sensor provided on the lens body, the sensor including a flexible polymeric substrate having a top surface and a layer of amorphous carbon formed on the top surface of the substrate.
Dependencies are inferred from the claim text.