Exhaust system and control device
AssigneeShimadzu Corporation
InventorsMasaya NAKAMURA, Kiyonori HIROTA, Junichiro KOZAKI, Nobuyuki HIRATA, Atsuo NAKATANI
Life of this patent
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Abstract
A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprises: a motor driver configured to drive a rotor driving motor of the vacuum pump; a valve plate driver configured to drive a valve plate driving motor of the vacuum valve; and a controller configured to control the motor driver and the valve plate driver.
Claims8
A control device configured to control each of a vacuum pump and a vacuum valve provided on a side of a suction port of the vacuum pump, the control device comprising:
- a motor driver configured to drive a rotor driving motor of the vacuum pump;
- a valve plate driver configured to drive a valve plate driving motor of the vacuum valve;
- and
- a controller configured to control the motor driver and the valve plate driver.
Dependencies are inferred from the claim text.