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US 2018/0023624 A1Published application
Static pressure gas bearing
AssigneeSumitomo Heavy Industries, Ltd.
InventorsTatsuya Yoshida, Kazutoshi Sakaki
Life of this patent
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Abstract
A static pressure gas bearing used in a vacuum environment includes a guide shaft and a tubular slider which is movable in an axial direction in a state where the guide shaft is accommodated therein. The slider is configured by fastening a plurality of plate-shaped members. A film formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.
Claims2
A static pressure gas bearing which is used in a vacuum environment, comprising:
- a guide shaft;
- and
- a tubular slider which is movable in an axial direction in a state where the guide shaft is accommodated therein,
- wherein the slider is configured by fastening a plurality of plate-shaped members, and
- wherein a film formed of a soft material having a smaller elastic modulus than that of each of the plate-shaped members is interposed between joint surfaces of the plate-shaped members.
2 more elements
Dependencies are inferred from the claim text.