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AssigneeDraka Comteq B.V.
InventorsMattheus Jacobus Nicolaas van Stralen, Igor Milicevic, Gertjan Krabshuis, Ton Breuls
Estimating the term…
A method and apparatus for performing a plasma chemical vapour deposition process including a mainly cylindrical resonator having an outer cylindrical wall and an inner coaxial cylindrical wall defining therebetween a resonant cavity operable at an operating frequency. The resonant cavity extends in a circumferential direction around a cylindrical axis of the inner and outer cylindrical wall. The outer cylindrical wall includes an input port connectable to an input waveguide. The inner cylindrical wall includes slit sections extending in a circumferential direction around the cylindrical axis. A greatest dimension defining the aperture of the slit sections is smaller than half the wavelength of the operating frequency.
A method for performing a plasma chemical vapour deposition process, comprising the steps of:
An apparatus for performing a plasma chemical vapour deposition process, comprising a mainly cylindrical resonator being provided with an outer cylindrical wall and an inner coaxial cylindrical wall defining therebetween a resonant cavity operable at an operating frequency and extending in a circumferential direction around a cylindrical axis of the inner and outer cylindrical wall, wherein the outer cylindrical wall includes an input port connectable to an input waveguide, and wherein the inner cylindrical wall includes slit sections extending in a circumferential direction around the cylindrical axis, a greatest dimension defining the aperture of the slit sections is smaller than half the wavelength of the operating frequency.
Dependencies are inferred from the claim text.