Ion implantation for modification of thin film coatings on glass
AssigneeIntevac, Inc.
InventorsTerry Bluck, Babak Adibi
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Abstract
The use of non-mass analyzed ion implanter is advantageous in such application as it generates ion implanting at different depth depending on the ions energy and mass. This allows for gaining advantage from lubricity offered as a result of the very light deposition on the surface, and at the same time the hardness provided by the intercalated ions implanted below it, providing benefits for cover glass, low E enhancement, and other similar materials. In further aspects, ion implantation is used to create other desirable film properties such anti-microbial and corrosion resistance.
Claims20
A method of fabricating a low-E glass panel, comprising:
- providing a glass panel;
- depositing a low emissivity coating on the glass, the low emissivity coating having a top surface exposed to surrounding environment;
- implanting a plurality of non-mass analyzed ions to a defined depth below the top surface of the low emissivity coating.
Dependencies are inferred from the claim text.