Magnetic-field-generating apparatus for magnetron sputtering

A racetrack-shaped magnetic-field-generating apparatus for magnetron sputtering comprising a straight portion and corner portions, and opposing a target to generate a magnetic field on a target surface, comprising on a magnetic base

• (a) a center permanent magnet arranged straight in said straight portion with its magnetization direction perpendicular to said target surface;
• (b) peripheral permanent magnets surrounding said center permanent magnet to form a racetrack-shaped periphery, with their magnetization directions perpendicular to said target surface, and their magnetic poles opposing said target being opposite to that of said center permanent magnet;
• (c) first, second and third intermediate permanent magnets arranged straight in said straight portion on both sides of said center permanent magnet, in parallel with said center permanent magnet, in this order toward said peripheral permanent magnets;
• and
• (d) fourth intermediate permanent magnets arranged in said corner portions and longitudinally separate from both ends of said center permanent magnet, with their magnetization directions perpendicular to said target surface, and their magnetic poles opposing said target being opposite to that of said center permanent magnet;
• said first intermediate permanent magnets being arranged with their magnetization directions perpendicular to said target surface, their magnetic poles opposing said target being opposite to that of said center permanent magnet;
• said second intermediate permanent magnets being arranged on said base via a magnetic gap, with their magnetization directions in parallel with said target surface, such that one magnetic pole of each second intermediate permanent magnet opposes a near-target side surface portion of each first intermediate permanent magnet, and that a magnetic pole of each second intermediate permanent magnet opposing said near-target side surface is opposite to the magnetic pole of said center permanent magnet opposing said target;
• and
• said third intermediate permanent magnets being arranged with their magnetization directions perpendicular to said target surface, their magnetic poles opposing said target being the same as that of said center permanent magnet.