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US 2018/0022607 A1Published application
Ozone Gas Generator and Method for Manufacturing Ozone Gas Generator
AssigneeSumitomo Precision Products Co., Ltd.
InventorTakashi MATSUNO
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Abstract
This ozone gas generator includes a pair of electrodes disposed at a predetermined interval to face each other, a pair of dielectrics provided on surfaces of the pair of electrodes that face each other, respectively, and a functional film provided on at least one of surfaces of the pair of dielectrics that face each other. The functional film contains a crystalline compound of a titanium oxide and a niobium oxide.
Claims7
An ozone gas generator comprising:
- a pair of electrodes disposed at a predetermined interval to face each other;
- a pair of dielectrics provided on surfaces of the pair of electrodes that face each other, respectively;
- and
- a functional film provided on at least one of surfaces of the pair of dielectrics that face each other, wherein
- the functional film contains a crystalline compound of a titanium oxide and a niobium oxide.
2 more elements
A method for manufacturing an ozone gas generator, comprising:
- producing a crystalline compound of a titanium oxide and a niobium oxide by heating the titanium oxide and the niobium oxide at 1000□ C or more;
- providing a pair of electrodes disposed at a predetermined interval to face each other;
- providing a pair of dielectrics on surfaces of the pair of electrodes that face each other, respectively;
- and
- providing a functional film that contains the crystalline compound of the titanium oxide and the niobium oxide on at least one of surfaces of the pair of dielectrics that face each other.
2 more elements
Dependencies are inferred from the claim text.