Molding system for applying a uniform clamping pressure onto a substrate
AssigneeAsm Technology Singapore Pte Ltd
InventorsShu Chuen HO, Choon Hong CHEONG, Chin Guan ONG, Kai WU, Teng Hock KUAH, Ji Yuan HAO
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AssigneeAsm Technology Singapore Pte Ltd
InventorsShu Chuen HO, Choon Hong CHEONG, Chin Guan ONG, Kai WU, Teng Hock KUAH, Ji Yuan HAO
Estimating the term…
A molding system for encapsulating electronic devices mounted on a substrate, the molding system comprising a first mold chase with a first mold chase surface and a second mold chase with a second mold chase surface opposite to the first mold chase surface, the first and second mold chase surfaces being operative to clamp onto the substrate and to apply a clamping pressure thereto. The molding system further comprises a first sensor located at a first position for determining a first relative distance between the substrate and a mold chase facing the substrate at the first position, and a second sensor located at a second position for determining a second relative distance between the substrate and a mold chase facing the substrate at the second position. The molding system also comprises a first actuator located adjacent to the first position and a second actuator located adjacent to the second position, wherein the first and second actuators are operative to adjust the first relative distance with respect to the second relative distance for applying a uniform clamping pressure onto the substrate.
A molding system for encapsulating electronic devices mounted on a substrate, the molding system comprising:
A method for encapsulating electronic devices mounted on a substrate, the method comprising the steps of:
The method for encapsulating electronic devices as claimed in claim 16, further comprising the steps of, after introducing liquefied molding compound onto the substrate:
Dependencies are inferred from the claim text.