Mold, imprinting method, imprint apparatus, and method for manufacturing a semiconductor article
AssigneeCanon Kabushiki Kaisha
InventorKen-ichiro Shinoda
Life of this patent
Estimating the term…
Abstract
A mold used for an imprint apparatus, including a pattern portion where a pattern is formed, and a peripheral portion surrounding the pattern portion, wherein the peripheral portion is provided with a light-shielding portion that blocks curing light for curing an imprint material and transmits detection light for detecting a detection target.
Claims16
A mold used for an imprint apparatus, the mold comprising:
- a pattern portion where a pattern is formed;
- and
- a peripheral portion surrounding the pattern portion,
- wherein the peripheral portion is provided with a light-shielding portion that blocks curing light for curing an imprint material and transmits detection light for detecting a detection target.
An imprinting method for forming a pattern on an imprint material supplied on a substrate, by using a mold that includes a pattern portion where a pattern is formed and a peripheral portion surrounding the pattern portion, the peripheral portion being provided with a light-shielding portion, the imprinting method comprising:
- aligning the mold and the substrate with each other;
- and
- bringing the mold into contact with the imprint material and curing the imprint material,
- wherein the light-shielding portion blocks curing light for curing the imprint material and transmits detection light for detecting a detection target.
An imprint apparatus configured to form a pattern of an imprint material on a substrate, by using a mold,
- wherein the mold includes a pattern portion where a pattern to be transferred onto the imprint material is formed, and a peripheral portion surrounding the pattern portion, and
- wherein the peripheral portion is provided with a light-shielding portion that blocks curing light for curing the imprint material and transmits detection light for detecting a detection target.
A method for manufacturing an article, the method comprising:
- forming a pattern of an imprint material on a substrate by an imprinting method;
- and
- processing the substrate on which the pattern has been formed in the forming,
- wherein the imprinting method is an imprinting method for forming a pattern of an imprint material on a substrate, by using a mold that includes a pattern portion where a pattern is formed and a peripheral portion surrounding the pattern portion, the peripheral portion being provided with a light-shielding portion, and includes:
- aligning the mold and the substrate with each other;
- and
- bringing the mold into contact with the imprint material and curing the imprint material,
- wherein the light-shielding portion blocks curing light for curing the imprint material and transmits detection light for detecting a detection target, and
- wherein an article is manufactured with the substrate that has been processed in the processing.
Dependencies are inferred from the claim text.