System for and method of seeding an optical proximity correction (opc) process

A computer-readable medium comprising computer-executable instructions for carrying out a method of seeding an optical proximity correction (OPC) process, the method comprising:

• interfacing, with an input device of a computer, thereby to receive a subject pre-OPC design-signature for a subject pre-OPC design package;
• making, via interaction with an OPC database operatively connected to the computer, comparisons between the subject pre-OPC design-signature and archived post-OPC design-signatures;
• selecting one amongst the archived post-OPC design-signatures based on the comparisons and thereby retrieving a selected one amongst archived post-OPC design packages corresponding to the archived post-OPC design-signatures;
• generating one or more seeds for the OPC process based on the selected archived post-OPC design package;
• revising at least some default coefficients based on the one or more seeds;
• and
• performing the OPC process on the subject pre-OPC design package according to the revised coefficients;
• wherein at least one of the making, selecting, generating, revising and performing is executed by a processor of the computer.

A system for seeding an optical proximity correction (OPC) process, the system comprising:

• at least one processor;
• and
• at least one memory including computer program code for one or more programs;
• wherein the at least one memory, the computer program code and the at least one processor are configured to cause the system to:
• receive, at an input device of a computer, a subject pre-OPC design-signature for a subject pre-OPC design package;
• select, by the processor and via interaction with an OPC database operatively connected to the computer, one amongst archived post-OPC design packages based on relatedness between the subject pre-OPC design-signature and archived post-OPC design-signatures corresponding to the archived post-OPC design packages, and thereby retrieving the selected archived post-OPC design package;
• generate one or more seeds for the OPC process based on the selected archived post-OPC design package;
• revise at least some default coefficients based on the one or more seeds;
• and
• perform the OPC process on the subject pre-OPC design package according to the revised coefficients.